Semi-ESC/Heater

ESC Parts List

Various material numbers, part numbers


Repair

Repair Description Issue
Level 1 Surface retreatment Surface roughness or flatness issue
Level 2 Level 1 + Re-bonding Bonding layer
Level 3 Level 2 + Plate exchange Crack or chipping on the ceramic plate
Level 4 Level 3 + Heater plate exchange Damage on the heater plate

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  • Vigus/Vesta

  • Producer-E

  • E-Max/Super-E

  • Speed

  • DRM/SCCM

  • Minos

  • KIYO (374 / 608 / 611 / 620)

  • Sym3

  • Entron

  • O3/O5/C4

  • MK3/MK4

  • PBN

Process & Repair scope

ESC New

Super-E / E-max 8”

ITEM UNIT OEM JESCO REMARK
Ceramic Puck - AlN AlN
Purity % ≥99.9 ≥99.9
Volume Resistivity Ω.㎝ 1010  ~  1012 1010  ~  1012 @500V
Thermal Conductivity W/mK 90 90 @RT
Density g/㎤ 3.26 3.26
Bonding Material - Same with OEM Damage on the heater plate

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KIYO ESC 12"

ITEM L374 L608 L611 L620 L632
Repair Scope L0/L1/L2/L3/L4 L0/L1/L2/L3/L4 L0/L1/L2/L3/L4 L0/L1/L2/L3/L4 L1/L2/L4
Part Number 839-019090-374 839-019090-608 839-019090-611 839-019090-620 839-019090-632
Ceramic Material OEM Al2O3 94%, JESCO Al2O3 96%
Printing Layer Single Single Single Single Multi
Heater Zone 2 Zone 4 Zone 4 Zone 4 Zone 4 Zone
Plate Size Φ 295.25 Φ 295.75 Φ 297.88
Embossing Size Φ 0.25 Φ 1.0 Φ 1.5
Silicone Bonding(Heater) Same Method

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Ultima 8”/12”

  • Ultima 8"

  • Ultima 12"

ESC

Kiyo 300mm

Process Equipment Mode Type Part Number
ETCH Kiyo Al2O3 Plate 839-019090-608
ETCH Kiyo Al2O3 Plate 839-019090-611
ETCH Kiyo Al2O3 Plate 839-019090-620
ETCH Kiyo Al2O3 Plate 839-019090-632
ETCH Kiyo Al2O3 Plate 839-019090-374
ETCH Kiyo Al2O3 Plate 839-019090-328
ETCH Kiyo Al2O3 Plate 839-019090-324

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Kiyo 12-8"

Process Equipment Mode Type Part Number
ETCH Kiyo Al2O3 Plate 839-019090-226
ETCH Kiyo Al2O3 Plate 839-019090-225
ETCH Kiyo Al2O3 Plate 839-019090-223

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E-Max/Super-E

Process Equipment Mode Type Part Number
ETCH Super-e AlN Plate 0040-39990
ETCH Super-e AlN Plate 0010-05966
ETCH E-Max AlN Plate 0040-05994
ETCH E-Max AlN Plate 0010-05971
ETCH E-Max AlN Plate 0040-40979
ETCH E-Max AlN Plate 0040-05493

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VESTA/SHIN/SCCM/JIN/VIGUS 300mm

Process Equipment Mode Type Part Number
ETCH VIGUS Al2O3 Plate 2L10-150079-13
ETCH VIGUS LK2 Al2O3 Plate 2L10-151441-11
ETCH VIGUS RK3 Al2O3 Plate 2L87-100888-12
ETCH VIGUS RK4 Al2O3 Plate 2L10-151982-11
ETCH SHIN Al2O3 Plate 3D10-150388-11
ETCH SHIN Al2O3 Plate 13311 type
ETCH VESTA Al2O3 Plate 41611 type
ETCH JIN Al2O3 Plate 3D87-057418-11
ETCH JIN Al2O3 Plate 3D10-100930-41

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Minos/Maya/4zone/SYM3

Process Equipment Mode Type Part Number
ETCH Mesa G5/ Maya Al2O3 Plate 0041-75950
ETCH Mesa C3,HT (4zone) Al2O3 Plate 0041-50966
ETCH Mesa G5/ Maya Al2O3 Plate 0010-50850
ETCH Mesa G5/ Maya Al2O3 Plate 0010-48840
ETCH Mesa G5/ G 3.9(Minos) Al2O3 Plate 0010-47763
ETCH Mesa G5/ G 3.9(Minos) Al2O3 Plate 0010-37176

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Exelan/Flex 200mm

Process Equipment Mode Type Part Number
ETCH Exelan Al2O3 Plate 839-440462-508
ETCH Exelan-HPT Al2O3 Plate 839-440462-518

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Exelan/Flex 12-8"

Process Equipment Mode Type Part Number
ETCH Flex Al2O3 Plate 839-800327-265
ETCH Flex Al2O3 Plate 839-800327-243
ETCH Flex Al2O3 Plate 839-800327-212

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Exelan/Flex 300mm

Process Equipment Mode Type Part Number
ETCH Flex Al2O3 Plate 839-800327-438
ETCH Flex 45 Al2O3 Plate 839-800327-432
ETCH Flex 45 Al2O3 Plate 839-800327-423
ETCH Flex Al2O3 Plate 839-800327-418
ETCH Flex Al2O3 Plate 839-800327-412
ETCH Flex Al2O3 Plate 839-800327-410
ETCH Flex Al2O3 Plate 839-800327-408
ETCH Flex Al2O3 Plate 839-800327-400
ETCH Flex Al2O3 Plate 839-800327-390
ETCH Flex Al2O3 Plate 839-800327-385
ETCH Flex Al2O3 Plate 839-800327-363
ETCH Flex Al2O3 Plate 839-800327-315
ETCH Flex Al2O3 Plate 839-800327-312

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Ultima

Process Equipment Mode Type Part Number
CVD Ultima Coating Type 0040-18219
CVD Ultima Coating Type 0040-18208
CVD Ultima Coating Type 0040-18053
CVD Ultima Coating Type 0040-48594

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DPS 200mm

Process Equipment Mode Type Part Number
ETCH DPS-Metal Ass'y AlN Plate 0040-77771
ETCH DPS-Metal AlN Plate 0200-02813
ETCH DPS-Poly Ass'y Coating Type 0040-54755
ETCH DPS-Poly Al2O3 Plate 0195-07994
ETCH DPS-Puck(Poly) AlN Plate 0010-15668
ETCH DPSⅡ AlN Plate 0010-15452

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DPS 300mm

Process Equipment Mode Type Part Number
ETCH DPS-2 (G3 ) Coating Type 0190-25087
ETCH DPS 232 G2 OPUS Al2O3 Plate 0190-23942
ETCH DPSⅡ Coating Type 0040-33215

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Producer

Process Equipment Mode Type Part Number
ETCH Producer-e AlN Plate 0010-24774
ETCH Producer Georgia AlN Plate 0041-77859

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IPS

Process Equipment Mode Type Part Number
ETCH IPS AlN Plate 0040-61184
ETCH IPS AlN Plate 0010-39903

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Novellus Speed 200mm

Process Equipment Mode Type Part Number
CVD Speed Al2O3 Plate 05-134263-00
CVD Speed Al2O3 Plate 02-134264-00

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Novellus speed 300mm

Process Equipment Mode Type Part Number
CVD Speed Al2O3 Plate 02-375302-00
CVD Speed Al2O3 Plate 02-283811-00
CVD Speed Al2O3 Plate 02-267289-00

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SCCM/DRM 200mm

Process Equipment Mode Type Part Number
ETCH DRM Al2O3 Plate 21D10-101956-12
ETCH DRM Al2O3 Plate 1D85-009005-12
ETCH DRM Al2O3 Plate 1D10-101692-11
ETCH DRM Al2O3 Plate 1D10-101692-13
ETCH SCCM Al2O3 Plate 1810-121880-11

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